Projection optical system and projection type display device

ABSTRACT

A projection optical system is constituted by, in order from the reduction side, a first optical system constituted by a plurality of lenses for forming an image displayed by image display elements as an intermediate image, and a second optical system constituted by a plurality of lenses for forming the intermediate image on a magnification side conjugate plane. Conditional Formula (1) below is satisfied.
 
8.20 &lt;Imφ·f 2 /f   2 &lt;20.00  (1)

CROSS REFERENCE TO RELATED APPLICATIONS

The present application claims priority under 35 U.S.C. §119 to JapanesePatent Application No. 2015-035082 filed on Feb. 25, 2015. The aboveapplication is hereby expressly incorporated by reference, in itsentirety, into the present application.

BACKGROUND

The present disclosure is related to a projection optical system and aprojection type display device. Particularly, the present disclosure isrelated to a projection optical system which is favorably suited for usein a projection type display device having light valves such as liquidcrystal display elements or DMD's (Digital Micromirror Devices®), and aprojection type display device that employs this projection opticalsystem.

Recently, projection type display devices (also referred to as“projectors”) which are equipped with light valves such as liquidcrystal display elements and DMD's (Digital Micromirror Devices®) are inwide use, and the performance thereof is increasing.

Accompanying the improved performance of recent light valves, there isdemand for projection optical systems to favorably correct aberrationsso as to be compatible with the resolutions of the light valves.Further, projection optical systems having wider angles of view are ingreat demand, taking the fact that projectors are utilized incomparatively small interior spaces for presentations and the like.

Projection optical systems that form an intermediate image with a firstoptical system constituted by a plurality of lenses, then performrefocusing operations with a second optical system also constituted by aplurality of lenses have been proposed, in order to meet these demands(refer to Japanese Patent No. 4210314 and Japanese Unexamined PatentPublication No. 2006-330410).

In a projection optical system constituted by an ordinary optical systemthat does not form an intermediate image, if a widening of the angle ofview is achieved by shortening the focal length thereof, the lensestoward the magnification side will become excessively large. Incontrast, a projection optical system that forms an intermediate imageas described above is capable of shortening the back focus of the secondoptical system while decreasing the diameters of lenses of the secondoptical system toward the magnification side, and is favorably suited toincreasing the angle of view by shortening the focal length thereof.

SUMMARY

However, Japanese Patent No. 4210314 discloses an optical system thatforms an intermediate image with a first optical system, then projectsthe intermediate image by magnifying and reflecting it with anaspherical mirror. Although the use of the aspherical mirror is suitedfor widening the angle of view, the size of the mirror will be large,which is extremely disadvantageous from the viewpoint of cost. Inaddition, aberrations are corrected independently by a first opticalsystem and a second optical system with an intermediate image at theboundary therebetween in the projection optical system of JapaneseUnexamined Patent Publication No. 2006-330410. Therefore, a widening ofthe angle of view cannot be achieved to a degree which is becomingrequired recently.

The present disclosure has been developed in view of the foregoingcircumstances. The present disclosure provides a projection opticalsystem that forms an intermediate image having high projectionperformance with a wide angle of view, in which various aberrations arefavorably corrected and cost is suppressed. The present disclosure alsoprovides a projection type display device equipped with this projectionoptical system.

The projection optical system of the present disclosure is a projectionoptical system that projects images displayed by image display elementsprovided on a reduction side conjugate plane onto a magnification sideconjugate plane as a magnified image, consisting of, in order from thereduction side to the magnification side:

a first optical system constituted by a plurality of lenses that formsthe image displayed by the image display elements as an intermediateimage; and

a second optical system constituted by a plurality of lenses thatfocuses the intermediate image on the magnification side conjugateplane;

in which Conditional Formula (1) below is satisfied:8.20<Imφ·f2/f ²<20.00  (1)

wherein Imφ is the effective image diameter at the reduction side, f2 isthe focal length of the second optical system, and f is the focal lengthof the entire projection optical system.

In the projection optical system of the present disclosure, it ispreferable for Conditional Formula (1-1) below to be satisfied.8.30<Imφ·f2/f ²<16.00  (1-1).

In addition, it is preferable for Conditional Formula (2) below to besatisfied. Note that it is more preferable for Conditional Formula (2-1)below to be satisfied.0.020<enP/TL2<0.160  (2)0.050<enP/TL2<0.145  (2-1)

wherein enP is the distance along the optical axis from the surface mosttoward the magnification side in the second optical system to theposition of an entrance pupil in the case that the magnification side isa light entry side, and TL2 is the distance along the optical axis fromthe surface most toward the reduction side in the second optical systemto the surface most toward the magnification side in the second opticalsystem.

In addition, it is preferable for Conditional Formula (3) below to besatisfied. Note that it is more preferable for Conditional Formula (3-1)below to be satisfied.0.125<Imφ/TL2<0.240  (3)0.130<Imφ/TL2<0.200  (3-1)

wherein Imφ is the effective image diameter at the reduction side, andTL2 is the distance along the optical axis from the surface most towardthe reduction side in the second optical system to the surface mosttoward the magnification side in the second optical system.

In addition, if the second optical system is divided into a first lensgroup at the reduction side and a second lens group at the magnificationside with the largest air gap along the optical axis within the secondoptical system interposed therebetween, it is preferable for ConditionalFormula (4) below to be satisfied. Note that it is more preferable forConditional Formula (4-1) to be satisfied.0.30<f22/f21<2.00  (4)0.40<f22/f21<1.70  (4-1)

wherein f21 is the focal length of the first lens group, and f22 is thefocal length of the second lens group.

In addition, it is preferable for Conditional Formula (5) to besatisfied. Note that it is more preferable for Conditional Formula (5-1)to be satisfied.4.0<Bf/|f|  (5)5.0<Bf/|f|<20.0  (5-1)

wherein Bf is the back focus of the entire optical system, and f is thefocal length of the entire optical system.

In addition, it is preferable for the first optical system and thesecond optical system to have a common optical axis.

In addition, it is preferable for a principal light ray at the maximumangle of view and the optical axis of the second optical system tointersect at the portion of the second optical system at which thelargest air gap along the optical axis is present.

In addition, the intermediate image may be configured such that theperipheral portion has more field curvature toward the first opticalsystem than the portion thereof at the center of the optical axis.

In addition, it is preferable for the surface most toward themagnification side in the first optical system to be a concave surface,and for the surface most toward the reduction side in the second opticalsystem to be a convex surface.

A projection type display device of the present disclosure comprises alight source, light valves into which light from the light sourceenters, and a projection optical system of the present disclosure as aprojection optical system that projects an optical image formed by lightwhich is optically modulated by the light valves.

Note that the “magnification side” refers to the side toward whichoptical images are projected (the side toward a screen). For the sake ofconvenience, the side toward the screen will be referred to as themagnification side even in cases that optical images are reduced andprojected. Meanwhile, the “reduction side” refers to a side toward anoriginal image display region (the side toward a light valve). For thesake of convenience, the side toward the light valve will be referred toas the reduction side even in cases that images are reduced andprojected.

In addition, the expression “consisting of” means that the projectionoptical system may include: lenses without any practical refractivepower; and optical elements other than lenses such as mirrors, stops,masks, a cover glass, and filters, in addition to the constituentelements which are listed above.

In addition, a “lens group” is not necessarily constituted by aplurality of lenses, and may be constituted by a single lens.

In addition, with respect to the “back focus”, the magnification sideand the reduction side are respectively considered as corresponding tothe object side and the image side of a common imaging lens, and themagnification side and the reduction side are respectively designated asthe front side and the back side of the optical system.

In addition, “Imφ” can be obtained from the specification of theprojection optical system, the specification of the apparatus on whichthe projection optical system is mounted, for example.

In addition, the surface shapes and the signs of the refractive indicesof the lenses are those which are considered in the paraxial region incases that aspherical surfaces are included.

The projection optical system of the present disclosure is a projectionoptical system that projects images displayed by image display elementsprovided on a reduction side conjugate plane onto a magnification sideconjugate plane as a magnified image, consisting of, in order from thereduction side to the magnification side: a first optical systemconstituted by a plurality of lenses that forms the image displayed bythe image display elements as an intermediate image; and a secondoptical system constituted by a plurality of lenses that focuses theintermediate image on the magnification side conjugate plane; in whichConditional Formula (1) below is satisfied:8.20<Imφ·f2/f ²<20.00  (1).Therefore, it becomes possible to realize a projection optical systemthat forms an intermediate image having high projection performance witha wide angle of view, in which various aberrations are favorablycorrected and cost is suppressed.

In addition, the projection type display device of the presentdisclosure is equipped with the projection optical system of the presentdisclosure. Therefore, the cost of the apparatus can be reduced, andimages having high image quality can be projected at a wide angle ofview.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a sectional diagram that illustrates the configuration of aprojection optical system according to an embodiment of the presentdisclosure (common with Example 1).

FIG. 2 is a sectional diagram that illustrates the configuration of aprojection optical system according to Example 2 of the presentdisclosure.

FIG. 3 is a sectional diagram that illustrates the configuration of aprojection optical system according to Example 3 of the presentdisclosure.

FIG. 4 is a sectional diagram that illustrates the configuration of aprojection optical system according to Example 4 of the presentdisclosure.

FIG. 5 is a sectional diagram that illustrates the configuration of aprojection optical system according to Example 5 of the presentdisclosure.

FIG. 6 is a sectional diagram that illustrates the configuration of aprojection optical system according to Example 6 of the presentdisclosure.

FIG. 7 is a sectional diagram that illustrates the configuration of aprojection optical system according to Example 7 of the presentdisclosure.

FIG. 8 is a collection of diagrams that illustrate aberrations of theprojection optical system of Example 1.

FIG. 9 is a collection of diagrams that illustrate aberrations of theprojection optical system of Example 2.

FIG. 10 is a collection of diagrams that illustrate aberrations of theprojection optical system of Example 3.

FIG. 11 is a collection of diagrams that illustrate aberrations of theprojection optical system of Example 4.

FIG. 12 is a collection of diagrams that illustrate aberrations of theprojection optical system of Example 5.

FIG. 13 is a collection of diagrams that illustrate aberrations of theprojection optical system of Example 6.

FIG. 14 is a collection of diagrams that illustrate aberrations of theprojection optical system of Example 7.

FIG. 15 is a diagram that schematically illustrates the configuration ofa projection type display device according to an embodiment of thepresent disclosure.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

Hereinafter, embodiments of the present disclosure will be described indetail with reference to the accompanying drawings. FIG. 1 is asectional diagram that illustrates the configuration of a projectionoptical system according to an embodiment of the present disclosure. Theexample illustrated in FIG. 1 corresponds to a projection optical systemof Example 1 to be described later. In FIG. 1, the side of an imagedisplay surface Sim is the reduction side, and the side of a final lensL32 of the second optical system G2 is the magnification side. Theaperture stop St illustrated in FIG. 1 does not necessarily representthe size or shape thereof, but the position thereof along an opticalaxis Z. In addition, FIG. 1 also shows an axial light beam wa and alight beam wb at a maximum angle of view.

This projection optical system may be mounted in a projection typedisplay device and utilized to project image information displayed onlight valves onto a screen. In FIG. 1, a case in which the projectionoptical system is mounted in a projection type display device isassumed, and an optical member PP that assumes filters, prisms, and thelike which are employed in a color combining section or an illuminatinglight separating section as well as the image display surface Sim of thelight valves positioned at the surface of the optical member PP towardthe reduction side are also illustrated. In the projection type displaydevice, light beams onto which image information is imparted by theimage display surface Sim enter the projection optical system via theoptical member PP, and are projected onto a screen (not shown) by theprojection optical system.

As illustrated in FIG. 1, the projection optical system consists of, inorder from the reduction side to the magnification side: a first opticalsystem G1 constituted by a plurality of lenses that forms the imagedisplayed by the image display elements as an intermediate image; and asecond optical system G2 constituted by a plurality of lenses thatfocuses the intermediate image on a magnification side conjugate plane.

In an ordinary projection optical system constituted only by an opticalsystem that does not form an intermediate image, if a widening of theangle of view is achieved by shortening the focal length thereof, thelenses toward the magnification side will become excessively large. Incontrast, the projection optical system of the present embodiment thatforms an intermediate image is capable of shortening the back focus ofthe second optical system G2 while decreasing the diameters of lenses ofthe second optical system G2 toward the magnification side, and isfavorably suited to increasing the angle of view by shortening the focallength thereof. In addition, an expensive aspherical mirror is notnecessary, and therefore cost can be suppressed.

Note that in the projection optical system of the present embodiment,the reduction side is configured to be telecentric. Here, the expression“the reduction side is telecentric” means that an angular line thatbisects the cross section of a light beam focused at an arbitrary pointon the image display surface Sim, which is the reduction conjugateplane, between the maximum ray of light at the upper side and themaximum ray of light at the lower side thereof is close to beingparallel with the optical axis Z. The expression “the reduction side istelecentric” is not limited to cases in which the reduction side iscompletely telecentric, that is, cases in which the bisecting angularline is completely parallel to the optical axis, but also refers tocases in which a certain degree of error is present. Here, the certaindegree of error refers to a range of inclination between the bisectingangular line and the optical axis Z of ±3°.

In addition, the projection optical system is configured such thatConditional Formula (1) below is satisfied. Conditional Formula (1)defines the relationship among the effective image diameter at thereduction side, the focal length of the second optical system G2, andthe focal length of the entire projection optical system. By configuringthe projection optical system such that the value of Imφ·f2/f² is notgreater than or equal to the upper limit defined in Conditional Formula(1), the effective image diameter can be prevented from becomingexcessively great with respect to the focal length of the entireprojection optical system, and the power of the second optical system G2can be prevented from becoming excessively weak with respect to thefocal length of the entire projection optical system. As a result, thediameters of the lenses of the second optical system G2 can bedecreased, and the entire projection optical system can be miniaturized.By configuring the projection optical system such that the value ofImφ·f2/f² is not less than or equal to the lower limit defined inConditional Formula (1), the effective image diameter can be preventedfrom becoming excessively small with respect to the focal length of theentire projection optical system, and the power of the second opticalsystem G2 can be prevented from becoming excessively strong with respectto the focal length of the entire projection optical system. As aresult, the requirements for the second optical system G2 to correctaberrations (particularly spherical aberration and astigmatism) arelessened, and realizing high performance is facilitated. Note that morefavorable properties can be obtained if Conditional Formula (1-1) belowis satisfied.8.20<Imφ·f2/f ²<20.00  (1)8.30<Imφ·f2/f ²<16.00  (1-1)

wherein Imφ is the effective image diameter at the reduction side, f2 isthe focal length of the second optical system, and f is the focal lengthof the entire projection optical system.

In addition, the projection optical system is configured such thatConditional Formula (2) below is satisfied. Conditional Formula (2)defines the ratio between the distance along the optical axis from thesurface most toward the magnification side in the second optical systemG2 to the position of an entrance pupil in the case that themagnification side is a light entry side and the total length of thesecond optical system G2. In an ordinary optical system that does notform an intermediate image, it is necessary to secure a long back focus.However, it is not necessary to secure a long back focus for the secondoptical system G2 in the present embodiment because an intermediateimage is formed. Therefore, it is possible to move the position of theentrance pupil more toward the magnification side compared to anordinary optical system that does not form an intermediate image, and awidening of the angle of view can be achieved while decreasing thediameter of the lens most toward the magnification side within thesecond optical system G2. Conditional Formula (2) defines the ratio thatenables this state to be achieved. By configuring the projection opticalsystem such that the value of enP/TL2 is not greater than or equal tothe upper limit defined in Conditional Formula (2), the position of theentrance pupil can be moved more toward the magnification side, andsecuring a desired angle of view is facilitated. By configuring theprojection optical system such that the value of enP/TL2 is not lessthan or equal to the lower limit defined in Conditional Formula (2), thetotal length of the second optical system G2 can be prevented frombecoming excessively long, while suppressing an increase in the diameterof the lens most toward the magnification side within the second opticalsystem 2. Note that more favorable properties can be obtained ifConditional Formula (2-1) below is satisfied.0.020<enP/TL2<0.160  (2)0.050<enP/TL2<0.145  (2-1)

wherein enP is the distance along the optical axis from the surface mosttoward the magnification side in the second optical system to theposition of an entrance pupil in the case that the magnification side isa light entry side, and TL2 is the distance along the optical axis fromthe surface most toward the reduction side in the second optical system.

In the projection optical system of the present embodiment, it ispreferable for Conditional Formula (3) below to be satisfied.Conditional Formula (3) defines the ratio between the effective imagediameter at the reduction side and the total length of the secondoptical system G2. By configuring the projection optical system suchthat the value of Imφ/TL2 is not greater than or equal to the upperlimit defined in Conditional Formula (3), increases in the sensitivityto error of individual lenses within the second optical system G2 due toexcessive miniaturization can be suppressed, and productivity can bemaintained. By configuring the projection optical system such that thevalue of Imφ/TL2 is not less than or equal to the lower limit defined inConditional Formula (3), a desired effective image diameter can beobtained, while the total length of the second optical system G2 can beprevented from becoming excessively great. Note that more favorableproperties can be obtained if Conditional Formula (3-1) below issatisfied.0.125Imφ/TL2<0.240  (3)0.130Imφ/TL2<0.200  (3-1)

wherein Imφ is the effective image diameter at the reduction side, andTL2 is the distance along the optical axis from the surface most towardthe reduction side in the second optical system.

In addition, it is preferable for the second optical system G2 to bedivided into a first lens group G21 at the reduction side and a secondlens group G22 at the magnification side with the largest air gap alongthe optical axis within the second optical system G2 interposedtherebetween, and for Conditional Formula (4) below to be satisfied.Conditional Formula (4) defines the ratio between the focal lengths ofthe first lens group G21 and the second lens group G22 within the secondoptical system G2. By configuring the projection optical system suchthat the value of f22/f21 is not greater than or equal to the upperlimit defined in Conditional Formula (4), the power of the first lensgroup G21 will be prevented from becoming excessively strong withrespect to that of the second lens group G22. As a result, the incidentangles of light that enters the first optical system G1 can be preventedfrom becoming excessively great, and correcting aberrations in the firstoptical system G1 will be facilitated. By configuring the projectionoptical system such that the value of f22/f21 is not less than or equalto the lower limit defined in Conditional Formula (4), the power of thesecond lens group G22 will be prevented from becoming excessively strongwith respect to that of the first lens group G21. As a result,correcting distortion in the second lens group G22 will be facilitated.Note that more favorable properties can be obtained if ConditionalFormula (4-1) below is satisfied.0.30<f22/f21<2.00  (4)0.40<f22/f21<1.70  (4-1)

wherein f21 is the focal length of the first lens group, and f22 is thefocal length of the second lens group.

In addition, it is preferable for Conditional Formula (5) below to besatisfied. Conditional Formula (5) defines the back focus of the entireprojection optical system, and sets a sufficient back focus necessaryfor a space to provide a color combining prism and the like at thereduction side of the entire projection optical system. By configuringthe projection optical system such that the value of Bf/|f| is not lessthan or equal to the lower limit defined in Conditional Formula (5), theback focus can be prevented from becoming excessively short. As aresult, providing a color combining prism and the like is facilitated.Note that more favorable properties can be obtained if ConditionalFormula (5-1) below is satisfied. By configuring the projection opticalsystem such that the value of Bf/|f| is not greater than or equal to theupper limit defined in Conditional Formula (5-1), the back focus can beprevented from becoming excessively long, and therefore miniaturizationcan be achieved.4.0<Bf/|f|  (5)5.0<Bf/|f|<20.00  (5-1)

wherein Bf is the back focus of the entire projection optical system (anair converted length), and f is the focal length of the entireprojection optical system.

In addition, it is preferable for the first optical system and thesecond optical system to have a common optical axis. By configuring theprojection optical system in this manner, the structure of theprojection optical system can be simplified as a whole. Therefore, thisconfiguration contributes to a reduction in cost.

In addition, the intermediate image may be configured such that theperipheral portion has more field curvature toward the first opticalsystem than the portion thereof at the center of the optical axis. Inthis manner, by keeping distortion, astigmatism, and the like in thefirst optical system G1 and canceling these aberrations in the secondoptical system G2 instead of correcting aberrations in the first opticalsystem G1 and the second optical system G2 independently, it becomespossible to favorably correct various aberrations even with a smallnumber of lenses while achieving a widening of the angle of view.

In addition, it is preferable for the surface most toward themagnification side in the first optical system G1 to be a concavesurface, and for the surface most toward the reduction side in thesecond optical system G2 to be a convex surface. By adopting thisconfiguration, it becomes possible to correct distortion with respect tooff axis light rays at high image heights.

Note that as illustrated in FIG. 1, the projection optical system of thepresent embodiment is equipped with a first optical path bending meansR1 that bends an optical path with a planar reflective surface, providedbetween the first optical system G1 and the second optical system G2. Inaddition, the projection optical system of the present embodiment isequipped with a second optical path bending means R2 that bends anoptical path with a planar reflective surface, provided between thefirst lens group G21 and the second lens group G22 of the second opticalsystem G2.

By providing the optical path bending means in intermediate positionswithin the projection optical system in this manner, the optical pathbending means can be miniaturized compared to a case in which an opticalpath bending means is provided at the magnification side of a projectionoptical system. In addition, by providing two optical path bending meanswithin the projection optical system, miniaturization of the projectionoptical system as a whole and control of the projection direction isfacilitated. In addition, by configuring the reflective surface of eachoptical path bending means to be a planar surface, cost can besuppressed compared to a case in which an optical path bending meanshaving an aspherical reflective surface, such as an aspherical mirror,is employed.

In the case that such a configuration is adopted, it is preferable for aprincipal light ray at the maximum angle of view and the optical axis ofthe second optical system G2 to intersect at the portion of the secondoptical system G2 at which the largest air gap along the optical axis ispresent. The size of the second optical path bending means R2 can beminiaturized by adopting such a configuration.

In addition, it is preferable for the first optical path bending meansand/or the second optical path bending means to be a mirror. Byemploying mirrors in this manner, light loss due to the transmissivityof members will not occur, heat will influence the optical path bendingmeans less, and the optical path bending means can be formed to belightweight, when compared to a case in which prisms are employed. Forthese reasons, employing mirrors is advantageous from the viewpoints ofproperties and productivity in the case that each of the optical pathbending means is configured to perform horizontal reflection or verticalreflection.

In addition, it is preferable for the first optical path bending meansand/or the second optical path bending means to be provided to bend theoptical path 90 degrees. By adopting such a configuration,miniaturization of the projection optical system as a whole can beefficiently achieved.

In addition, it is preferable for images which are displayed by theimage display elements to be projected as magnified images which areinverted by 180 degrees. By adopting such a configuration, the size ofthe system as a whole that includes a screen and the projection opticalsystem can be miniaturized.

Next, examples of numerical values of the projection optical system ofthe present disclosure will be described.

First, the projection optical system according to Example 1 will bedescribed. FIG. 1 is a sectional diagram that illustrates theconfiguration of the projection optical system according to Example 1.Note that in FIG. 1 and in FIGS. 2 through 7 that correspond to Examples2 through 7 to be described later, the side of the image display surfaceSim is the reduction side, and the side of a final lens L32 within thesecond optical system (a final lens L34 only for Example 5) is themagnification side. The aperture stops St illustrated in the drawings donot necessarily represent the sizes or shapes thereof, but the positionsthereof along the optical axis Z. In addition, FIGS. 1 through 7 alsoshow axial light beams wa and light beams wb at a maximum angle of view.

The projection optical system according to Example 1 is constituted by,in order from the reduction side to the magnification side, the firstoptical system G1, the first optical path bending means R1, and thesecond optical system G2. The first optical system G1 is constituted byten lenses, which are lenses L1 through L10, and the second opticalsystem G2 is constituted by twelve lenses, which are lenses L21 throughL32. In addition, the second optical system G2 is constituted by, inorder from the reduction side to the magnification side, the first lensgroup G21, the second optical path bending means R2, and the second lensgroup G22. The first lens group G21 is constituted by six lenses, whichare lenses L21 through L26, and the second lens group G22 is constitutedby six lenses, which are lenses L27 through L32.

Basic lens data of the projection optical system according to Example 1are shown in Table 1, data related to various items are shown in Table2, and data related to aspherical surface coefficients are shown inTable 3. The meanings of the symbols in the tables will be describedwith those related to Example 1 as an example. However, they arebasically same for Examples 2 through 7 as well.

In the lens data of Table 1, surface numbers that sequentially increasefrom the magnification side to the reduction side, with the surfacetoward the magnification side of the constituent element at the mostmagnification side designated as first, are shown in the column “SurfaceNumber”. The radii of curvature of each of these surfaces are shown inthe column “Radius of Curvature”. The distances between each surface anda next surface are shown in the column “Distance”. The refractiveindices with respect to the d line (wavelength: 587.6 nm) of each of theoptical elements are shown in the column “nd”. The Abbe's numbers ofeach of the optical elements with respect to the d line (wavelength:587.6 nm) are shown in the column “vd”. Here, the signs of the radii ofcurvature are positive in cases that the surface shape is convex towardthe object side, and negative in cases that the surface shape is convextoward the image side. Table 1 also shows the aperture stop St and theoptical member PP. Text reading “(stop)” is shown along with the surfacenumber in the row in the column of surface numbers corresponding to thesurface of the aperture stop St.

The values of the focal length f, the back focus Bf, the F value FNo.,and the full angle of view 2ω are shown as data related to various itemsin Table 2.

Note that the numerical values of the basic lens data and the datarelated to various items are those which are normalized such that theabsolute value of the focal length of the entire projection opticalsystem becomes 1. In addition, the numerical values in each of thetables are rounded off at a predetermined number of digits.

In the lens data of Table 1, an “*” is indicated along with the surfacenumbers of aspherical surfaces, and numerical values related to theparaxial radii of curvature are shown in the column that shows the radiiof curvature for the aspherical surfaces. The data related to asphericalsurface coefficients of Table 3 shows the surface numbers of theaspherical surfaces and aspherical surface coefficients related to theaspherical surfaces. The aspherical surface coefficients are thecoefficients KA and Am (m=3˜17) represented by the aspherical surfaceshape formula below.

${Zd} = {\frac{C \times h^{2}}{1 + \sqrt{1 - {{KA} \times C^{2} \times h^{2}}}} + {\sum\limits_{m}{{Am} \times h^{m}}}}$

wherein: Zd is the depth of the aspherical surface (the length of anormal line from a point on an aspherical surface at a height h to aplane perpendicular to the optical axis that contacts the peak of theaspherical surface), h is the height (the distance from the optical axisto the surface of the lens), C is the paraxial curvature, and KA and Amare aspherical surface coefficients (m=3˜17).

TABLE 1 Example 1: Lens Data Surface Number Radius of Curvature Distancend νd  *1 −6.0454 0.7622 1.49100 57.58  *2 −23.1701 0.8901  3 17.24560.5145 1.80610 40.93  4 5.6254 1.3385  5 9.4485 0.3810 1.80610 33.27  64.4487 2.4299  7 −13.0249 0.3047 1.77250 49.60  8 7.9549 3.5242  937.3401 3.8111 1.64769 33.79  10 −9.8610 0.3711  11 12.3243 0.81981.80518 25.42  12 49.0021 8.7225  13 41.0416 0.2494 1.80518 25.42  145.6876 2.2334 1.59282 68.62  15 −8.3664 0.0379  16 11.0541 2.44211.72916 54.68  17 −4.7277 0.4579 1.80518 25.42  18 13.4072 1.8900 *1920.2550 0.9529 1.51007 56.24 *20 1984.7652 2.3243  21 156.9733 1.46361.80518 25.42  22 −11.3871 13.6810 *23 −6.4082 0.9529 1.49100 57.58 *24−6.4862 0.0952  25 −23.8508 0.4307 1.80518 25.42  26 14.6943 3.70341.77250 49.60  27 −13.4010 0.0379  28 14.1100 2.2807 1.77250 49.60  29−47.6613 3.1484  30 6.6271 1.1795 1.80400 46.58  31 25.2352 0.23831.51742 52.43  32 3.4758 3.9425  33 (stop) ∞ 0.3237  34 −3.4327 0.19231.80518 25.42  35 6.5801 0.9770 1.59282 68.62  36 −4.1078 2.6800  37−41.8171 1.3861 1.51633 64.14  38 −5.2781 0.0379  39 9.7434 1.20041.80518 25.42  40 −59.6891 3.3573  41 ∞ 4.7637 1.51633 64.14  42 ∞Second optical path bending means positioned at 4.9115 toward thereduction side from the 12th surface First optical path bending meanspositioned at 10.0606 toward the reduction side from the 22nd surface

TABLE 2 Example 1: Items (d line) f′ −1.00 Bf′ 6.50 FNo. 2.00 2ω [°]137.4

TABLE 3 Example 1: Aspherical Surface Coefficients Surface Number 1 2 19KA −8.5831337E−01 1.5267730E+00 1.0000000E+00 A3 1.3500124E−021.6207700E−02 0.0000000E+00 A4 3.7355108E−03 −1.5811440E−037.2756257E−03 A5 −1.5958047E−03 −2.6343865E−05 −1.1125847E−03 A61.6144623E−04 4.6257457E−05 −4.3853690E−04 A7 1.9376746E−05−9.1010163E−06 −9.6686212E−05 A8 −5.4169501E−06 −1.1093364E−07−1.2964384E−06 A9 7.3993426E−08 2.0922090E−07 3.4086512E−05 A108.4962283E−08 −1.0107572E−08 −2.7066187E−06 A11 −6.8422640E−09−2.0627751E−09 −3.3282322E−06 A12 −4.7910538E−10 1.4750183E−104.6361979E−07 A13 7.9463074E−11 9.8397311E−12 1.5667589E−07 A14−7.6995814E−13 −8.1234981E−13 −2.1732042E−08 A15 −2.9134071E−13−1.8967333E−14 −3.6501692E−09 A16 1.1711185E−14 1.5857063E−153.3018889E−10 A17 — — 3.3724534E−11 Surface Number 20 23 24 KA1.0000000E+00 1.0000000E+00 1.0000000E+00 A3 1.1570968E−18 1.4379200E−180.0000000E+00 A4 1.1017431E−02 1.5339083E−03 1.0017244E−03 A56.3653027E−04 −1.5364843E−04 1.6329654E−04 A6 −1.5459887E−037.5849186E−05 −1.1437954E−04 A7 −6.7282664E−05 6.4644403E−057.8011554E−05 A8 1.4511524E−04 −3.0470719E−05 −9.1645167E−06 A9−1.3328630E−05 −1.8064302E−06 −6.8267502E−06 A10 −8.8345669E−062.5038294E−06 1.8502503E−06 A11 2.4349490E−06 −1.5479839E−071.6669133E−07 A12 2.9922618E−07 −9.3616561E−08 −1.0039622E−07 A13−1.5541144E−07 1.1174150E−08 2.8772081E−09 A14 −3.4183472E−091.6690407E−09 2.3388596E−09 A15 4.5654529E−09 −2.6272163E−10−1.8625879E−10 A16 −2.6343230E−11 −1.1361384E−11 −2.0187141E−11 A17−5.2171013E−11 2.1681971E−12 2.1924717E−12

Diagrams that illustrate various aberrations of the projection opticalsystem according to Example 1 are illustrated in FIG. 8. The sphericalaberration, the astigmatism, the distortion, and the lateral chromaticaberration are illustrated in order from the left side of the drawingsheet of FIG. 8. The diagrams that illustrate spherical aberration,astigmatism, and distortion show aberrations that have the d line(wavelength: 587.6 nm) as a reference wavelength. The diagram thatillustrates spherical aberration shows aberrations related to the d line(wavelength: 587.6 nm), the C line (wavelength: 656.3 nm), and the Fline (wavelength: 486.1 nm) indicated by a solid line, a long brokenline, and a short broken line, respectively. In the diagrams thatillustrate astigmatism, aberrations related to the d line in thesagittal direction and the tangential direction are indicated by a solidline and a short broken line, respectively. In the diagram thatillustrates lateral chromatic aberration, aberrations related to the Cline and the F line are indicated by a long broken line and a shortbroken line, respectively. In the diagrams that illustrate sphericalaberration, “FNo.” denotes F numbers, and in the diagrams thatillustrate other aberrations, “ω” denotes half angles of view.

Note that the numerical values shown in the basic lens data and the datarelated to various items as well as the diagrams that illustrateaberrations are all those for a finite projection distance. The datarelated to Example 1 are those for a case in which the projectiondistance is 121.950.

The symbols, meanings, and the manner in which each type of data areshown in the description of Example 1 above are the same for thefollowing Examples unless particularly noted. Therefore, redundantdescriptions will be omitted below.

Next, a projection optical system according to Example 2 will bedescribed. FIG. 2 is a sectional diagram that illustrates theconfiguration of the projection optical system according to Example 2.The projection optical system according to Example 2 is the same as thataccording to Example 1, except that a first optical system G1 isconstituted by nine lenses, which are lenses L1 through L9. In addition,basic lens data are shown in Table 4, data related to various items areshown in Table 5, data related to aspherical surface coefficients areshown in Table 6, and diagrams that illustrate aberrations areillustrated in FIG. 9 for the projection optical system according toExample 2. For Example 2, data are shown for a case in which theprojection distance is 121.933.

TABLE 4 Example 2: Lens Data Surface Number Radius of Curvature Distancend νd  *1 −5.8925 0.7620 1.49100 57.58  *2 −20.1570 0.8369  3 15.55650.5142 1.80610 33.27  4 5.6978 1.4192  5 10.0304 0.3809 1.80400 46.58  64.1382 2.5409  7 −11.8212 0.3047 1.69680 55.53  8 7.4250 3.2265  921.6797 3.8106 1.62588 35.70  10 −9.6963 0.6623  11 13.0592 0.72991.80518 25.42  12 45.3570 8.7778  13 29.4001 0.2494 1.80518 25.42  145.7492 2.3083 1.59282 68.62  15 −8.9476 0.0379  16 10.9153 2.56651.72916 54.68  17 −4.9491 0.2761 1.80518 25.42  18 13.1774 1.9787 *1937.8174 0.9528 1.51007 56.24 *20 −42.8078 2.1168  21 28.9497 1.54391.80518 25.42  22 −15.3485 16.7184 *23 −6.8136 0.9524 1.49100 57.58 *24−6.3119 0.0953  25 26.6794 0.4304 1.80518 25.42  26 11.9638 2.99761.80400 46.58  27 −15.6135 2.2913  28 6.2479 1.9616 1.79952 42.22  29−19.3391 0.2380 1.75520 27.51  30 4.7254 4.1465  31 (stop) ∞ 1.2584  32−2.9686 0.1922 1.69895 30.13  33 7.6474 1.1974 1.49700 81.54  34 −4.55341.1333  35 −56.3920 1.5180 1.51633 64.14  36 −4.8487 0.0379  37 9.88911.2337 1.80518 25.42  38 −43.9166 3.3192  39 ∞ 4.7630 1.51633 64.14  40∞ Second optical path bending means positioned at 4.9674 toward thereduction side from the 12th surface First optical path bending meanspositioned at 11.3838 toward the reduction side from the 22nd surface

TABLE 5 Example 2: Items (d line) f′ −1.00 Bf′ 6.50 FNo. 2.00 2ω [°]137.4

TABLE 6 Example 2: Aspherical Surface Coefficients Surface Number 1 2 19KA −9.1567984E−01 1.4161570E+00 1.0000000E+00 A3 1.2952037E−021.5904415E−02 0.0000000E+00 A4 3.9150390E−03 −1.3949854E−039.3942194E−03 A5 −1.5698458E−03 4.4581928E−05 −1.4325021E−03 A61.5067101E−04 3.6644074E−05 −7.4380791E−04 A7 1.9408238E−05−1.1288892E−05 4.8872772E−05 A8 −5.1447424E−06 9.4146166E−081.0656305E−05 A9 5.4632195E−08 2.4324539E−07 1.0315634E−05 A108.1696007E−08 −1.2116421E−08 −5.7754042E−07 A11 −6.3994138E−09−2.3676359E−09 −1.3572625E−06 A12 −4.6802337E−10 1.5599848E−101.7149721E−07 A13 7.5394399E−11 1.1315205E−11 6.9656284E−08 A14−6.7157046E−13 −8.1910668E−13 −8.7243284E−09 A15 −2.7762688E−13−2.1842079E−14 −1.7008941E−09 A16 1.1039658E−14 1.5599543E−151.3147816E−10 A17 — — 1.6357442E−11 Surface Number 20 23 24 KA1.0000000E+00 1.0000000E+00 1.0000000E+00 A3 0.0000000E+00 0.0000000E+000.0000000E+00 A4 1.3217033E−02 1.0973771E−03 7.2353797E−04 A5−3.8764052E−05 −1.6119120E−04 3.1890659E−04 A6 −1.3457239E−039.2374493E−05 −2.1155652E−04 A7 −2.5284883E−05 2.6448831E−058.5393245E−05 A8 5.9734739E−05 −2.2364856E−05 −9.6262302E−07 A9−3.4756794E−07 1.0647077E−06 −9.5399408E−06 A10 1.0993936E−071.4823302E−06 1.9030259E−06 A11 2.3308460E−07 −2.0231799E−073.2394660E−07 A12 −1.3176092E−07 −4.5293765E−08 −1.2798209E−07 A13−1.4357380E−08 8.8634300E−09 3.6171844E−10 A14 5.8120548E−096.4024409E−10 3.3681773E−09 A15 3.6457202E−10 −1.6537919E−10−2.1991630E−10 A16 −8.6133307E−11 −3.1465255E−12 −3.1913698E−11 A17−3.5469901E−12 1.1501260E−12 3.1394043E−12

Next, a projection optical system according to Example 3 will bedescribed. FIG. 3 is a sectional diagram that illustrates theconfiguration of the projection optical system according to Example 3.The projection optical system according to Example 3 is the same as thataccording to Example 1, except that a first optical system G1 isconstituted by nine lenses, which are lenses L1 through L9. In addition,basic lens data are shown in Table 7, data related to various items areshown in Table 8, data related to aspherical surface coefficients areshown in Table 9, and diagrams that illustrate aberrations areillustrated in FIG. 10 for the projection optical system according toExample 3. For Example 3, data are shown for a case in which theprojection distance is 121.682.

TABLE 7 Example 3: Lens Data Surface Number Radius of Curvature Distancend νd  *1 −5.9537 0.7607 1.49100 57.58  *2 −22.4102 1.1909  3 15.51820.5135 1.77250 49.60  4 5.7832 1.5272  5 10.9610 0.3801 1.77250 49.60  64.1302 2.6498  7 −9.7742 0.3044 1.58913 61.13  8 7.6108 3.1655  931.3501 3.8027 1.60342 38.03  10 −9.3384 0.5129  11 11.5048 0.74431.80518 25.42  12 37.5734 7.7422  13 118.7760 0.2492 1.80518 25.42  145.6890 2.5387 1.59282 68.62  15 −6.8714 0.0382  16 10.3143 2.67021.65160 58.55  17 −5.0732 1.5513 1.80518 25.42  18 11.7432 0.9153 *19−85.1980 0.9506 1.51007 56.24 *20 −15.9578 2.6015  21 79.1298 2.30271.80518 25.42  22 −9.1227 13.6474  23 −30.0089 0.4296 1.80518 25.42  248.9423 3.7247 1.60562 43.71  25 −10.7747 0.0380  26 14.8618 1.73231.80400 46.58  27 −43.2477 2.5494  28 6.8161 1.7763 1.80400 46.58  29−18.9168 0.2378 1.51742 52.43  30 3.5606 3.6937  31 (stop) ∞ 0.4566  32−3.1391 0.1921 1.80518 25.42  33 5.7762 1.0367 1.59282 68.62  34 −4.39600.8015  35 −185.9641 3.5097 1.48749 70.24  36 −5.0890 0.0382  37 8.77491.2786 1.80518 25.42  38 −82.3017 3.3434  39 ∞ 4.7532 1.51633 64.14  40∞ Second optical path bending means positioned at 3.9396 toward thereduction side from the 12th surface First optical path bending meanspositioned at 10.7955 toward the reduction side from the 22nd surface

TABLE 8 Example 3: Items (d line) f′ −1.00 Bf′ 6.49 FNo. 2.00 2ω [°]137.2

TABLE 9 Example 3: Aspherical Surface Coefficients Surface Number 1 2 19KA −9.7838303E−01 −2.6347599E−02 1.0000000E+00 A3 1.7745692E−022.2903118E−02 0.0000000E+00 A4 3.1804157E−03 −3.0350282E−031.1028892E−02 A5 −1.8105557E−03 3.3186241E−05 −3.4560622E−03 A62.1912345E−04 1.0526652E−04 6.7953883E−04 A7 2.2206788E−05−1.9795493E−05 3.3574732E−04 A8 −7.4954415E−06 −1.0039607E−06−3.6915532E−04 A9 1.6658017E−07 4.9003027E−07 3.3471927E−05 A101.1584383E−07 −6.9036888E−09 4.0859303E−05 A11 −9.7504792E−09−5.3997242E−09 −8.1250707E−06 A12 −6.5436739E−10 1.9679141E−10−2.0676654E−06 A13 1.0811525E−10 2.8987621E−11 5.7889510E−07 A14−8.7836424E−13 −1.3215137E−12 5.0174747E−08 A15 −3.8863108E−13−6.2055308E−14 −1.8562606E−08 A16 1.4852258E−14 2.9502248E−15−4.6261415E−10 A17 — — 2.3023163E−10 Surface Number 20 KA 1.0000000E+00A3 0.0000000E+00 A4 1.1686461E−02 A5 1.1628046E−03 A6 −2.3602068E−03 A79.5211393E−04 A8 6.5610185E−05 A9 −2.3291961E−04 A10 4.7859293E−05 A111.7803555E−05 A12 −6.5699490E−06 A13 −3.1176802E−07 A14 3.2974300E−07A15 −1.8680233E−08 A16 −5.8711149E−09 A17 6.3669476E−10

Next, a projection optical system according to Example 4 will bedescribed. FIG. 4 is a sectional diagram that illustrates theconfiguration of the projection optical system according to Example 4.The configuration of the projection optical system according to Example4 is the same as that according to Example 1. In addition, basic lensdata are shown in Table 10, data related to various items are shown inTable 11, data related to aspherical surface coefficients are shown inTable 12, and diagrams that illustrate aberrations are illustrated inFIG. 11 for the projection optical system according to Example 4. ForExample 4, data are shown for a case in which the projection distance is121.811.

TABLE 10 Example 4: Lens Data Surface Number Radius of CurvatureDistance nd νd  *1 −6.9306 0.8121 1.49100 57.58  *2 −44.8371 0.5265  313.5687 0.5483 1.80518 25.42  4 6.2556 1.8879  5 14.4551 0.4058 1.7995242.22  6 4.3283 2.5036  7 −15.5363 0.3246 1.80400 46.58  8 8.0372 4.5605 9 71.2289 2.1682 1.64769 33.79  10 −9.5623 0.3540  11 11.7365 0.82401.80518 25.42  12 46.7315 9.2507  13 17.9887 0.2657 1.80518 25.42  144.8108 2.2397 1.53775 74.70  15 −7.2175 0.0404  16 10.5125 2.35571.67790 55.34  17 −4.4440 0.2942 1.80518 25.42  18 11.1288 0.3251 *1912.2198 0.8907 1.51007 56.24 *20 13.5064 0.3292  21 13.7443 1.69411.59282 68.62  22 −9.8049 15.2264 *23 −7.0308 1.0153 1.51007 56.24 *24−6.8249 0.1013  25 −21.7935 0.4587 1.80518 25.42  26 18.3685 3.67621.80400 46.58  27 −12.7408 0.0404  28 18.9842 1.8629 1.80400 46.58  29−63.2950 3.1011  30 12.2347 1.6669 1.80400 46.58  31 −21.4475 0.25361.54814 45.78  32 4.0727 8.1896  33 (stop) ∞ 0.8035  34 −5.8768 0.20511.84666 23.78  35 7.9679 1.0619 1.49700 81.54  36 −5.4317 4.1679  37−45.9194 1.5980 1.51633 64.14  38 −6.6372 0.0404  39 17.0560 1.08031.80518 25.42  40 −66.7966 3.6543  41 ∞ 14.1859 1.51633 64.14  42 ∞0.6091 1.50847 61.19  43 ∞ Second optical path bending means positionedat 5.1903 toward the reduction side from the 12th surface First opticalpath bending means positioned at 10.9631 toward the reduction side fromthe 22nd surface

TABLE 11 Example 4: Items (d line) f′ −1.00 Bf′ 13.45 FNo. 2.50 2ω [°]139.8

TABLE 12 Example 4: Aspherical Surface Coefficients Surface Number 1 219 KA −9.6578232E−01 7.1797830E+00 1.0000000E+00 A3 1.5152595E−021.7786856E−02 0.0000000E+00 A4 2.4745249E−03 −1.8010192E−037.2368068E−03 A5 −1.4192070E−03 −2.1112616E−04 −1.0862983E−03 A61.7031530E−04 5.0422771E−05 −8.5312809E−04 A7 1.4163708E−05−8.7904656E−07 −3.0853539E−04 A8 −4.9232854E−06 −4.3347102E−077.6609049E−05 A9 1.2572919E−07 4.1185022E−08 8.7265414E−05 A106.7186825E−08 −7.9498160E−10 −1.3671151E−05 A11 −5.7701281E−09−3.3328951E−10 −9.0721375E−06 A12 −3.2588431E−10 3.4304624E−111.5586581E−06 A13 5.7373154E−11 1.0307507E−12 4.7059813E−07 A14−6.4187374E−13 −1.9225952E−13 −7.5089483E−08 A15 −1.8715151E−13−1.0720720E−15 −1.2172965E−08 A16 7.2850548E−15 3.3466154E−161.2819746E−09 A17 — — 1.2480983E−10 Surface Number 20 23 24 KA1.0000000E+00 1.0000000E+00 1.0000000E+00 A3 0.0000000E+00 0.0000000E+000.0000000E+00 A4 1.0409797E−02 2.0896951E−03 1.3888769E−03 A51.3491359E−03 −1.6041807E−05 2.1379246E−04 A6 −2.5137397E−03−5.7456735E−05 −1.7408475E−04 A7 −3.2541827E−04 2.5117861E−055.2556125E−05 A8 3.4362373E−04 −8.5697549E−06 −2.8508038E−07 A91.9870848E−05 6.4738130E−08 −4.4651233E−06 A10 −2.8029664E−057.3456995E−07 9.2310511E−07 A11 2.5095644E−07 −1.1220112E−079.9022538E−08 A12 1.3425464E−06 −2.2982349E−08 −5.2005980E−08 A13−7.8570318E−08 5.4013252E−09 1.7527741E−09 A14 −3.3597707E−083.0684516E−10 1.1516468E−09 A15 3.2268052E−09 −1.0235851E−10−9.8561406E−11 A16 3.3008718E−10 −1.2594636E−12 −9.2007459E−12 A17−4.3653244E−11 7.0689178E−13 1.0505968E−12

Next, a projection optical system according to Example 5 will bedescribed. FIG. 5 is a sectional diagram that illustrates theconfiguration of the projection optical system according to Example 5.In the projection optical system according to Example 5, a first opticalsystem G1 is constituted by eight lenses, which are lenses L1 throughL8, a first lens group G21 within a second optical system G2 isconstituted by seven lenses, which are lenses L21 through L27, and asecond lens group G22 is constituted by seven lenses, which are lensesL28 through L34. In addition, basic lens data are shown in Table 13,data related to various items are shown in Table 14, data related toaspherical surface coefficients are shown in Table 15, and diagrams thatillustrate aberrations are illustrated in FIG. 12 for the projectionoptical system according to Example 5. For Example 5, data are shown fora case in which the projection distance is 193.485.

TABLE 13 Example 5: Lens Data Surface Number Radius of CurvatureDistance nd νd  *1 −5.6596 0.7533 1.53158 55.08  *2 −16.3802 0.5746  314.3992 0.5991 1.83481 42.72  4 7.2250 2.1723  5 16.5662 0.4452 1.8340037.16  6 5.0703 2.6525  7 −46.4337 0.3425 1.67790 55.34  8 7.4771 2.3614 *9 −38.9505 0.9035 1.49100 57.58 *10 −81.9445 4.3890  11 2242.00951.6268 1.56732 42.82  12 −9.5556 0.3537  13 13.7977 0.6579 1.84666 23.78 14 36.1136 9.7598  15 19.1527 0.2928 1.80518 25.46  16 6.0893 2.43801.59282 68.62  17 −11.9454 0.0427  18 16.0233 2.5802 1.69680 55.53  19−5.4733 0.2740 1.72825 28.46  20 6.6027 0.6754  21 13.0660 1.38891.49700 81.61  22 −15.6033 2.2536 *23 −10.4647 1.0976 1.49100 57.58 *24−6.7619 1.5735  25 46.2663 1.6396 1.84666 23.78  26 −21.0908 21.4463  27−85.4771 0.4486 1.80518 25.46  28 13.5453 3.8081 1.54814 45.78  29−13.3932 0.0341  30 13.1189 2.3187 1.80400 46.58  31 −86.5640 7.7542  324.6327 0.3402 1.53172 48.84  33 3.4248 1.3953  34 (stop) ∞ 1.3698  35−3.5518 0.2073 1.80518 25.46  36 12.7160 1.0861 1.59282 68.62  37−5.1660 0.8689  38 −60.7625 1.6228 1.49700 81.61  39 −5.3392 2.3935  4017.4292 1.2453 1.80809 22.76  41 −18.4369 2.9837  42 ∞ 6.7814 1.5163364.14  43 ∞ Second optical path bending means positioned at 5.4792toward the reduction side from the 14th surface First optical pathbending means positioned at 13.9124 toward the reduction side from the26th surface

TABLE 14 Example 5: Items (d line) f′ −1.00 Bf′ 7.46 FNo. 1.90 2ω [°]146.2

TABLE 15 Example 5: Aspherical Surface Coefficients Surface Number 1 2 9KA −1.1816188E+00 −1.3324618E+01 1.0000000E+00 A3 9.9914448E−031.8025934E−02 0.0000000E+00 A4 1.9941605E−03 −1.6590684E−02−3.5796035E−03 A5 −6.2703958E−04 1.6231240E−02 1.0861780E−03 A64.0424283E−05 −1.0738823E−02 1.9213727E−04 A7 5.2426763E−064.9447881E−03 −1.6203496E−04 A8 −9.0449589E−07 −1.6200774E−038.1745411E−06 A9 4.0097482E−09 3.8466696E−04 9.9925225E−06 A108.5415190E−09 −6.6958175E−05 −1.3729672E−06 A11 −5.4877705E−108.5531167E−06 −2.0453540E−07 A12 −2.5750016E−11 −7.9253815E−074.1005319E−08 A13 3.9725886E−12 5.1808517E−08 −7.5519988E−10 A14−5.7578837E−14 −2.2637072E−09 −3.0968595E−11 A15 −8.8476101E−155.9290878E−11 0.0000000E+00 A16 3.3317364E−16 −7.0358287E−130.0000000E+00 A17 — — 0.0000000E+00 Surface Number 10 23 24 KA1.0000000E+00 1.0000000E+00 1.0000000E+00 A3 0.0000000E+00 0.0000000E+000.0000000E+00 A4 −2.0633751E−03 6.5744572E−03 9.5826426E−03 A55.0576859E−04 −1.5664386E−03 −1.7691499E−03 A6 2.2728842E−04−8.1425427E−04 −5.2488705E−04 A7 −1.2340116E−04 2.8588920E−041.3275678E−04 A8 6.1449182E−07 4.3874670E−05 1.7872875E−05 A99.7487777E−06 −3.0501761E−05 −4.4079773E−06 A10 −1.5115907E−06−4.7115824E−07 −6.1994851E−07 A11 −1.5091304E−07 2.0101846E−063.4847902E−08 A12 5.8002139E−08 −1.0264767E−07 1.7662157E−08 A13−6.8430174E−09 −8.0165715E−08 1.9499489E−09 A14 4.4980543E−105.6191783E−09 −2.2111521E−10 A15 0.0000000E+00 1.7533315E−09−5.4715476E−11 A16 0.0000000E+00 −8.4020597E−11 5.5653886E−13 A170.0000000E+00 −1.5951602E−11 4.2354510E−13

Next, a projection optical system according to Example 6 will bedescribed. FIG. 6 is a sectional diagram that illustrates theconfiguration of the projection optical system according to Example 6,The projection optical system according to Example 6 is the same as thataccording to Example 1, except that a first optical system G1 isconstituted by nine lenses, which are lenses L1 through L9. In addition,basic lens data are shown in Table 16, data related to various items areshown in Table 17, data related to aspherical surface coefficients areshown in Table 18, and diagrams that illustrate aberrations areillustrated in FIG. 13 for the projection optical system according toExample 6. For Example 6, data are shown for a case in which theprojection distance is 193.308.

TABLE 16 Example 6: Lens Data Surface Number Radius of CurvatureDistance nd νd  *1 −7.8431 0.8210 1.53158 55.08  *2 −40.3388 0.2762  313.5021 0.5986 1.83400 37.16  4 7.2749 2.0717  5 15.5196 0.4446 1.8040046.58  6 5.0340 2.8719  7 −20.9879 0.3591 1.77250 49.60  8 8.9222 8.5533 9 564.7144 0.9891 1.54814 45.78  10 −12.7779 0.4910  11 13.4910 0.79181.84666 23.78  12 88.8120 9.5547  13 16.1687 0.2924 1.80518 25.42  145.6967 2.1478 1.49700 81.54  15 −10.8982 0.0426  16 9.2883 2.69611.77250 49.60  17 −4.9601 0.2738 1.80518 25.42  18 6.5971 2.1956 *19117.6592 1.1976 1.49100 57.58 *20 −20.1220 2.0104  21 23.1638 2.07121.80518 25.42  22 −16.0224 15.6878 *23 −6.8792 1.1976 1.49100 57.58 *24−7.0459 6.2838  25 439.3811 0.4653 1.80518 25.42  26 11.6780 3.63011.77250 49.60  27 −21.3793 0.0344  28 10.1113 1.8923 1.83481 42.72  2936.7596 5.2069  30 4.1405 0.2396 1.54814 45.78  31 2.9701 2.6461  32(stop) ∞ 0.7601  33 −3.6394 0.2070 1.80518 25.42  34 7.2962 1.02831.59282 68.62  35 −4.3434 2.6611  36 −25.8763 1.6263 1.48749 70.24  37−5.1461 0.0343  38 13.4402 1.1842 1.80809 22.76  39 −38.5360 2.9797  40∞ 6.7752 1.51633 64.14  41 ∞ Second optical path bending meanspositioned at 5.2780 toward the reduction side from the 12th surfaceFirst optical path bending means positioned at 10.8979 toward thereduction side from the 22nd surface

TABLE 17 Example 6: Items (d line) f′ −1.00 Bf′ 7.44 FNo. 2.15 2ω [°]144.0

TABLE 18 Example 6: Aspherical Surface Coefficients Surface Number 1 219 KA −8.6374673E−01 2.8058941E+00 1.0000000E+00 A3 1.0892111E−021.3536870E−02 0.0000000E+00 A4 2.0602299E−03 −1.7423092E−037.6281741E−03 A5 −8.4137148E−04 1.4102816E−04 −1.6584501E−03 A68.4099509E−05 3.0740117E−05 −1.0742824E−04 A7 6.2292141E−06−1.0742136E−05 1.2151217E−04 A8 −1.9915067E−06 2.1190422E−07−7.1304107E−05 A9 5.8146838E−08 1.8001317E−07 4.9527146E−06 A102.1536466E−08 −9.8113054E−09 6.6513222E−06 A11 −1.8578714E−09−1.4131917E−09 −1.1932142E−06 A12 −7.7044970E−11 9.7692964E−11−2.7738852E−07 A13 1.4424950E−11 5.4836221E−12 6.8601540E−08 A14−1.9347377E−13 −4.1353110E−13 6.5114905E−09 A15 −3.7177479E−14−8.5800894E−15 −1.7418222E−09 A16 1.3629548E−15 6.4708517E−16−7.0262339E−11 A17 — — 1.6869216E−11 Surface Number 20 23 24 KA1.0000000E+00 1.0000000E+00 1.0000000E+00 A3 0.0000000E+00 0.0000000E+000.0000000E+00 A4 9.6085359E−03 7.0444903E−04 5.7465459E−04 A5−4.5097270E−04 2.1717416E−05 −9.3658722E−05 A6 −5.7756899E−04−6.2182315E−05 −1.5628839E−05 A7 1.3491746E−04 5.9343722E−054.4605724E−05 A8 −1.7133910E−05 −9.4771050E−06 −9.4703870E−06 A9−1.4555806E−05 −3.5657278E−06 −2.0686945E−06 A10 4.4644466E−061.1643902E−06 8.7408667E−07 A11 6.7813254E−07 4.5757831E−086.9936703E−09 A12 −2.6297019E−07 −4.7738954E−08 −3.1431820E−08 A13−1.2159623E−08 2.1012941E−09 1.8298205E−09 A14 6.9761449E−098.6855543E−10 5.1961946E−10 A15 −2.4056727E−11 −7.1980760E−11−4.7665745E−11 A16 −7.0658022E−11 −5.9292827E−12 −3.2693494E−12 A172.2005904E−12 6.3049866E−13 3.7035392E−13

Next, a projection optical system according to Example 7 will bedescribed. FIG. 7 is a sectional diagram that illustrates theconfiguration of the projection optical system according to Example 7.The projection optical system according to Example 7 is the same as thataccording to Example 1, except that a first optical system G1 isconstituted by eight lenses, which are lenses L1 through L8. Inaddition, basic lens data are shown in Table 19, data related to variousitems are shown in Table 20, data related to aspherical surfacecoefficients are shown in Table 21, and diagrams that illustrateaberrations are illustrated in FIG. 14 for the projection optical systemaccording to Example 7. For Example 7, data are shown for a case inwhich the projection distance is 193.142.

TABLE 19 Example 7: Lens Data Surface Number Radius of CurvatureDistance nd νd  *1 −8.8721 0.7519 1.49100 57.58  *2 −254.6544 0.6815  314.7212 0.5981 1.80400 46.58  4 7.0737 2.0265  5 15.1030 0.4442 1.8040046.58  6 4.9512 2.7912  7 −22.6376 0.3420 1.80400 46.58  8 9.8694 7.9726 9 810.9992 1.1266 1.57501 41.50  10 −11.9105 1.0465  11 12.8543 0.72931.84666 23.78  12 44.9139 9.8604  13 28.9195 0.2924 1.80518 25.46  145.9219 2.3732 1.59282 68.62  15 −11.6693 0.0427  16 10.6865 2.75351.77250 49.60  17 −5.3121 0.2734 1.80518 25.46  18 8.9458 2.2138 *1931.5562 1.1966 1.49100 57.58 *20 −35.3204 3.0720  21 32.6385 1.91331.84666 23.78  22 −16.3598 18.0987 *23 −7.1825 1.1966 1.49100 57.58 *24−6.6518 1.2347  25 −15.9865 0.4480 1.80518 25.46  26 17.6459 3.38891.77250 49.60  27 −13.5422 0.0340  28 15.3862 2.0644 1.83481 42.72  29−63.0485 8.7700  30 (stop) ∞ 1.4720  31 −3.9554 0.2067 1.80518 25.46  327.9139 2.5513 1.49700 81.61  33 −7.1158 0.0340  34 2527.1384 2.27511.49700 81.61  35 −5.8089 0.0340  36 14.7115 1.1539 1.80809 22.76  37−24.8086 2.9766  38 ∞ 6.7694 1.51633 64.14  39 ∞ Second optical pathbending means positioned at 5.5874 toward the reduction side from the12th surface First optical path bending means positioned at 12.2873toward the reduction side from the 22nd surface

TABLE 20 Example 7: Items (d line) f′ −1.00 Bf′ 7.44 FNo. 1.90 2ω [°]143.8

TABLE 21 Example 7: Aspherical Surface Coefficients Surface Number 1 219 KA −9.7629926E−01 −1.0121161E+15 1.0000000E+00 A3 1.0866457E−021.1735264E−02 0.0000000E+00 A4 1.2868927E−03 −1.4797870E−036.1198322E−03 A5 −6.7290615E−04 −2.3225992E−06 −1.4131764E−03 A67.8702501E−05 2.8097790E−05 −2.7703398E−04 A7 3.3166760E−06−3.5929021E−06 5.0964556E−05 A8 −1.5818367E−06 −9.1972990E−085.4732107E−06 A9 7.2167764E−08 5.4110745E−08 −5.9529727E−07 A101.4205009E−08 −1.9718799E−09 −1.4406845E−06 A11 −1.4904643E−09−3.4590147E−10 2.1870466E−07 A12 −3.4313829E−11 2.1659611E−111.1543151E−07 A13 9.7906392E−12 1.0456182E−12 −2.1652483E−08 A14−1.9373000E−13 −8.2794522E−14 −2.9163771E−09 A15 −2.2174334E−14−1.2553008E−15 7.4125754E−10 A16 8.7986626E−16 1.0971963E−162.1213106E−11 A17 — — −8.6988400E−12 Surface Number 20 23 24 KA1.0000000E+00 1.0000000E+00 1.0000000E+00 A3 0.0000000E+00 0.0000000E+000.0000000E+00 A4 9.7023658E−03 4.5207917E−04 5.4793408E−04 A5−8.6522764E−04 4.8773125E−04 2.1179068E−04 A6 −6.3276099E−04−1.1315321E−04 −3.2973787E−05 A7 1.0747981E−04 −1.4901296E−052.6130398E−06 A8 −1.1031205E−06 1.0410665E−05 −2.2356759E−06 A9−8.5955520E−06 −7.9284129E−08 7.2361539E−07 A10 2.4677641E−06−5.6734762E−07 1.3692429E−07 A11 3.7054306E−07 3.4763323E−08−7.4515410E−08 A12 −1.4276631E−07 1.8251511E−08 1.2476395E−09 A13−7.8425486E−09 −1.6251086E−09 2.2957361E−09 A14 3.5183434E−09−3.1272447E−10 −1.5632446E−10 A15 6.6949249E−11 3.2910950E−11−2.5652373E−11 A16 −3.2820464E−11 2.1959051E−12 2.1041002E−12 A17−7.0996642E−14 −2.4958836E−13 5.5467468E−14

Table 22 shows values corresponding to Conditional Formulae (1) through(5) for the projection optical systems according to Examples 1 through7. Note that all of the Examples use the d line as a referencewavelength, and the values shown in Table 22 are related to thereference wavelength.

TABLE 22 Formula Condition Example 1 Example 2 Example 3 Example 4Example 5 Example 6 Example 7 (1) Imφ · f2/f² 9.56 9.20 9.70 8.44 12.1111.75 11.79 (2) enP/TL2 0.117 0.117 0.120 0.132 0.112 0.117 0.116 (3)Imφ/TL2 0.143 0.143 0.138 0.168 0.161 0.151 0.144 (4) f22/f21 1.13 1.381.18 1.08 0.61 0.61 0.73 (5) Bf/|f| 6.50 6.50 6.49 13.45 7.46 7.44 7.44

Based on the above data, it can be understood that all of the projectionoptical systems according to Examples 1 through 7 satisfy ConditionalFormulae (1) through (5), and are projection optical systems having highprojection performance having wide angles of view of 135° or greater,that favorably correct various aberrations while suppressing cost.

Next, an embodiment of a projection type display device of the presentdisclosure will be described with reference to FIG. 15. FIG. 15 is aschematic diagram that illustrates a projection type display deviceaccording to the embodiment of the present disclosure.

The projection type display device 100 illustrated in FIG. 15 isequipped with: a projection optical system 10 according to an embodimentof the present disclosure; a light source 20; transmissive displayelements 11 a through 11 c that function as light valves eachcorresponding to a colored light beam; and an illuminating opticalsection 30 that guides a light beam form the light source 20 to thelight valves. The illuminating optical section has: dichroic mirrors 12and 13 for separating colors; a cross dichroic prism 14 for combiningcolors; condenser lenses 16 a through 16 c; and total reflection mirrors18 a through 18 c. Note that the projection optical system 10 isschematically illustrated in FIG. 15. In addition, although notillustrated in FIG. 15, an integrator such as a fly eye is providedbetween the light source 20 and the dichroic mirror 12.

White light output by the light source 20 is separated into threecolored light beams (G light, B light, and R light) by the dichroicmirrors 12 and 13. The optical paths of the colored light beams aredeflected by the total reflection mirrors 18 a through 18 c, then thecolored light beams enter the transmissive display elements 11 a through11 c corresponding thereto via the condenser lenses 16 a through 16 cand are optically modulated. After the colors are combined by the crossdichroic prism 14, the combined light beam enters the projection opticalsystem 10. The projection optical system 10 projects an optical imageformed by light which has been optically modulated by the transmissivedisplay elements 11 a through 11 c onto a screen (not shown).

Transmissive liquid crystal display elements, for example, may beemployed as the transmissive display elements 11 a through 11 c. Notethat FIG. 15 illustrates an example in which transmissive displayelements are employed as the light valves. However, the light valves tobe provided in the projection type display device of the presentdisclosure are not limited to transmissive display elements, and otherlight modulating means such as reflective liquid crystal displayelements and DMD's may alternatively be employed.

The projection type display device 100 of the present embodiment isequipped with the projection optical system 10 of the presentdisclosure. Therefore, the cost of the apparatus can be reduced, whilehigh quality images can be projected at wide angles of view.

The present disclosure has been described with reference to theembodiments and Examples thereof. However, the present disclosure is notlimited to the above embodiments and Examples, and various modificationsare possible. For example, the values of the radii of curvature, thedistances among surfaces, the refractive indices, the Abbe's numbers,and the aspherical surface coefficients of the lenses are not limited tothose indicated in the above Examples, and may be other values.

What is claimed is:
 1. A projection optical system that projects imagesdisplayed by image display elements provided on a reduction sideconjugate plane onto a magnification side conjugate plane as a magnifiedimage, consisting of, in order from the reduction side to themagnification side: a first optical system constituted by a plurality oflenses that forms the image displayed by the image display elements asan intermediate image; and a second optical system constituted by aplurality of lenses that focuses the intermediate image on themagnification side conjugate plane; in which Conditional Formula (1)below is satisfied:8.20<Imφ·f2/f ²<20.00  (1) wherein Imφ is an effective image diameter atthe reduction side, f2 is a focal length of the second optical system,and f is a focal length of an entire projection optical system.
 2. Theprojection optical system as defined in claim 1, in which ConditionalFormula (1-1) below is satisfied:8.30<Imφ·f2/f ²<16.00  (1-1).
 3. The projection optical system asdefined in claim 1, in which Conditional Formula (2) below is satisfied:0.020<enP/TL2<0.160  (2) wherein enP is a distance along an optical axisfrom a surface most toward the magnification side in the second opticalsystem to a position of an entrance pupil in the case that themagnification side is a light entry side, and TL2 is a distance along anoptical axis from a surface most toward the reduction side in the secondoptical system to the surface most toward the magnification side in thesecond optical system.
 4. The projection optical system as defined inclaim 3, in which Conditional Formula (2-1) below is satisfied:0.050<enP/TL2<0.145  (2-1).
 5. The projection optical system as definedin claim 1, in which Conditional Formula (3) below is satisfied:0.125<Imφ/TL2<0.240  (3) wherein TL2 is a distance along an optical axisfrom a surface most toward the reduction side in the second opticalsystem to a surface most toward the magnification side in the secondoptical system.
 6. The projection optical system as defined in claim 5,in which Conditional Formula (3-1) below is satisfied:0.130<Imφ/TL2<0.200  (3-1).
 7. The projection optical system as definedin claim 1, wherein: the second optical system is divided into a firstlens group at the reduction side and a second lens group at themagnification side with a largest air gap along an optical axis withinthe second optical system interposed therebetween; and ConditionalFormula (4) below is satisfied:0.30<f22/f21<2.00  (4) wherein f21 is a focal length of the first lensgroup, and f22 is a focal length of the second lens group.
 8. Theprojection optical system as defined in claim 7, in which ConditionalFormula (4-1) below is satisfied:0.40<f22/f21<1.70  (4-1).
 9. The projection optical system as defined inclaim 1, in which Conditional Formula (5) below is satisfied:4.0<Bf/|f|  (5) wherein Bf is a back focus of an entire optical system.10. The projection optical system as defined in claim 9, in whichConditional Formula (5-1) below is satisfied:5.0<Bf/|f|<20.0  (5-1).
 11. The projection optical system as defined inclaim 1, wherein: the first optical system and the second optical systemhave a common optical axis.
 12. The projection optical system as definedin claim 1, wherein: a principal light ray at a maximum angle of viewand an optical axis of the second optical system intersect at a portionof the second optical system at which a largest air gap along theoptical axis is present.
 13. The projection optical system as defined inclaim 1, wherein: the intermediate image is configured such that aperipheral portion has more field curvature toward the first opticalsystem than a portion thereof at a center of an optical axis.
 14. Theprojection optical system as defined in claim 1, wherein: a surface mosttoward the magnification side in the first optical system is a concavesurface; and a surface most toward the reduction side in the secondoptical system is a convex surface.
 15. A projection type displaydevice, comprising: a light source; light valves into which light fromthe light source enters; and the projection optical system as defined inclaim 1, wherein the projection optical system projects an optical imageformed by light which is optically modulated by the light valves.